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    Product laser

    Products
    Laser Wafer Cutting System
    Product Introduction
    The Kleave series is equipped with precision motion control and advanced laser processing technology to perform high-accuracy wafer dicing. Designed for superior cutting quality and process reliability, it prepares wafers for downstream expansion and backend operations. The equipment delivers a versatile and high-efficiency laser cutting solution tailored to the demands of modern semiconductor manufacturing.
    Product Features

    Supports wafer sizes of wide range and thicknesses

    Suitable for various substrates including sapphire, silicon, silicon carbide, lithium tantalate, and more

    High positioning accuracy and repeatability

    Excellent cutting quality with high straightness, no chipping or cracks

    Minimal damage zone


    Field of application
    Die-level dicing of Si, SiC, and other wafer substrate materials
    Technical indicators
    Laser Source DPSS Laser
    Wafer Size Support up to 12''
    X-axis Travelling Range
    Moving Speed
    Resolution
    Positioning Accuracy
    310 mm
    10 ~ 800 mm/s
    100 nm
    ±5 μm
    Y-axis Travelling Range
    Moving Speed
    Resolution
    Positioning Accuracy
    310 mm
    10 ~ 800 mm/s
    100 nm
    ±5 μm
    Z-axis Resolution
    Positioning Accuracy
    100 nm
    ±2 μm
    θ-axis Max. Rotating Angle 100 deg.
    Application Cases